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Accumulation of arsenic implantation‑induced donor defects in Hg0.7Cd0.3Te heteroepitaxial structures I. I. Izhnin, K. D. Mynbaev, A. V. Voitsekhovskii [et al.]

Contributor(s): Izhnin, Igor I | Mynbaev, Karim D | Voytsekhovskiy, Alexander V | Korotaev, Alexander G | Varavin, Vasilii S | Dvoretsky, Sergei A | Mikhailov, Nikolay N | Yakushev, Maxim V | Fitsych, Olena I | Świątek, Zbigniew | Jakiela, RafalMaterial type: ArticleArticleContent type: Текст Media type: электронный Subject(s): имплантация мышьяка | донорные дефекты | гетероэпитаксиальные структурыGenre/Form: статьи в журналах Online resources: Click here to access online In: Journal of electronic materials Vol. 50, № 6. P. 3714-3721Abstract: Accumulation of arsenic implantation-induced donor defects in heteroepitaxial Hg1−xCdxTe structures with the composition of the active layer xa = 0.30 was studied with the use of the Hall-efect measurements and mobility spectrum analysis. The studies allowed for identifying the carriers in the implantation-damaged n+-layer, namely, electrons with low and intermediate mobility, and for establishing the dependence of their concentration on the ion fuence. The electrically active implantation-induced defects in the studied structures, similar to the case of those with xa = 0.22, were identifed as atoms of interstitial mercury captured by dislocation loops and quasi-point defects. In the material with xa = 0.30, a weak dependence of theconcentration of low-mobility electrons on the fuence was observed. In general, a substantial diference in the properties of p+–n junctions formed as a result of arsenic implantation in the structures with xa = 0.30 and xa = 0.22 was established. The diference was explained by the efect of the graded-gap surface layer on the difusion of charged defects released during the implantation.
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Accumulation of arsenic implantation-induced donor defects in heteroepitaxial Hg1−xCdxTe structures with the composition of the active layer xa = 0.30 was studied with the use of the Hall-efect measurements and mobility spectrum analysis. The studies allowed for identifying the carriers in the implantation-damaged n+-layer, namely, electrons with low and intermediate mobility, and for establishing the dependence of their concentration on the ion fuence. The electrically active implantation-induced defects in the studied structures, similar to the case of those with xa = 0.22, were identifed as atoms of interstitial mercury captured by dislocation loops and quasi-point defects. In the material with xa = 0.30, a weak dependence of theconcentration of low-mobility electrons on the fuence was observed. In general, a substantial diference in the properties of p+–n junctions formed as a result of arsenic implantation in the structures with xa = 0.30 and xa = 0.22 was established. The diference was explained by the efect of the graded-gap surface layer on the difusion of charged defects released during the implantation.

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