Effect of oxygen on the Gas-sensitive properties of α-Ga2O3/ε-Ga2O3 structures A. V. Almaev, V. I. Nikolaev, S. I. Stepanov [et al.]
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ArticleContent type: Текст Media type: электронный Subject(s): кислород | газочувствительные свойства | газовые сенсорыGenre/Form: статьи в журналах Online resources: Click here to access online
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ECS meeting abstracts Vol. MA2021-01, № 56. P. 1475Abstract: Miniature O2 sensors with low energy consumption are of practical interest for the chemical and metallurgical industries, development of systems for analyzing the performance of internal combustion engines and as functional elements of artificial lung ventilation devices. The requirements for miniaturization, high sensitivity, speed and relative cheapness are satisfied by O2 sensors based on β-Ga2O3. The chemical and thermal stability of β-Ga2O3 allows developing gas sensors with extremely high operating temperatures of 400-1100 °C ensuring high reproducibility of their characteristics and high speed of operation. In turn, the high operating temperatures of O2 β-Ga2O3 sensors are their drawback causing high energy consumption.
Miniature O2 sensors with low energy consumption are of practical interest for the chemical and metallurgical industries, development of systems for analyzing the performance of internal combustion engines and as functional elements of artificial lung ventilation devices. The requirements for miniaturization, high sensitivity, speed and relative cheapness are satisfied by O2 sensors based on β-Ga2O3. The chemical and thermal stability of β-Ga2O3 allows developing gas sensors with extremely high operating temperatures of 400-1100 °C ensuring high reproducibility of their characteristics and high speed of operation. In turn, the high operating temperatures of O2 β-Ga2O3 sensors are their drawback causing high energy consumption.
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