Morphology, structure, and optical properties of SnO (x) films A. I. Nikiforov, V. A. Timofeev, V. I. Mashanov [et al.]
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ArticleContent type: Текст Media type: электронный Subject(s): оксид олова | эпитаксия | наноструктуры | дифракция рентгеновских лучей | коэффициент поглощенияGenre/Form: статьи в журналах Online resources: Click here to access online
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Russian physics journal Vol. 63, № 2. P. 276-281Abstract: The paper presents the morphological, structural, and optical properties of nanostructured SnO (x) films
obtained by molecular beam epitaxy using deposition of tin in an oxygen flux on an oxidized silicon substrate
as a function of the annealing temperature of the synthesized structure. The effect of annealing temperature on
the structural and phase state of the films is established. The orthorhombic phase of SnO2 was observed after
annealing in air at 500°C. An increase in the annealing temperature up to 800°C leads to the appearance of
small fraction of the tetragonal phase of SnO2. The effect of the crystal structure on the optical properties of tin
oxide films is shown. Ellipsometry revealed a sharp change in the optical constants of the film near the
annealing temperature of 500°C. The observed wide absorption band in the range 1.9–3.4 eV is apparently
associated with small (approximately 1%) amount of unoxidized metal Sn clusters. Photoluminescence in
a wide range of 450–850 nm with a maximum at ~600 nm is observed. An increase in the annealing
temperature from 500 to 800°С leads to an increase in the PL intensity by almost a factor of 6.
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The paper presents the morphological, structural, and optical properties of nanostructured SnO (x) films
obtained by molecular beam epitaxy using deposition of tin in an oxygen flux on an oxidized silicon substrate
as a function of the annealing temperature of the synthesized structure. The effect of annealing temperature on
the structural and phase state of the films is established. The orthorhombic phase of SnO2 was observed after
annealing in air at 500°C. An increase in the annealing temperature up to 800°C leads to the appearance of
small fraction of the tetragonal phase of SnO2. The effect of the crystal structure on the optical properties of tin
oxide films is shown. Ellipsometry revealed a sharp change in the optical constants of the film near the
annealing temperature of 500°C. The observed wide absorption band in the range 1.9–3.4 eV is apparently
associated with small (approximately 1%) amount of unoxidized metal Sn clusters. Photoluminescence in
a wide range of 450–850 nm with a maximum at ~600 nm is observed. An increase in the annealing
temperature from 500 to 800°С leads to an increase in the PL intensity by almost a factor of 6.
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