Ammonia sensors based on resistive structures M–SnO2:Sb–M A. V. Tsymbalov, V. M. Kalygina, N. K. Maksimova, E. V. Chernikov
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ArticleContent type: Текст Media type: электронный Subject(s): тонкие пленки | диоксид олова | высокочастотное магнетронное распыление | отклик сенсора | термоциклированиеGenre/Form: статьи в журналах Online resources: Click here to access online
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Journal of Physics: Conference Series Vol. 1499. P. 012037 (1-4)Abstract: The paper presents a comparison of the responses of sensors to ammonia in continuous heating and thermal cycling modes, and also shows the dependence of the response time of the sensors on the content NH3. Thin films of tin dioxide were obtained using RF magnetron sputtering, and then annealed in air at a temperature of 425°C for 24 hours. In thermal cycling, the temperature of the heating cycle remains constant 400 °C (duration of the heating cycle was 8 s). The temperature of the cooling cycle changes in the range 200 °C – 100 °C, but duration of cooling of the cooling cycle was remained constant of 5 s. It was shown that the thermal cycling mode has several advantages over the constant heating mode. The experiments showed that sensors based on SnO2:Sb have short response times – less than 3 seconds.
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The paper presents a comparison of the responses of sensors to ammonia in continuous heating and thermal cycling modes, and also shows the dependence of the response time of the sensors on the content NH3. Thin films of tin dioxide were obtained using RF magnetron sputtering, and then annealed in air at a temperature of 425°C for 24 hours. In thermal cycling, the temperature of the heating cycle remains constant 400 °C (duration of the heating cycle was 8 s). The temperature of the cooling cycle changes in the range 200 °C – 100 °C, but duration of cooling of the cooling cycle was remained constant of 5 s. It was shown that the thermal cycling mode has several advantages over the constant heating mode. The experiments showed that sensors based on SnO2:Sb have short response times – less than 3 seconds.
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