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The process of tungsten fluorides reduction by hydrogen is a component part of Fluoride technology of tungsten conversion. Nowadays the researchers are definitely interested in studying this process. It is connected with common use of metal tungsten products in different sectors of the economy, which is the result of unique qualities of this metal. With the help of physical and mathematical modelling of the process of tungsten hexafluoride reduction by hydrogen, it becomes possible to create an import substitution technology of metal tungsten conversion. Fluoride technology of tungsten conversion allows putting different coverings and make tungsten products of different shapes, which is impossible to get traditionally. The process of tungsten fluorides reduction by hydrogen can be referred to CVD processes (Chemical Vapor Deposition). Common use of CVD technologies for getting metal products and coverings is limited by definite problems, connected with access difficulties to initial components of research and the lack of information about their basic thermal characteristics. Therefore, mathematical description of the initial components mass-moving process, which provides with optimal value of their concentration in gas flow and in precipitation zone, is a question of current importance.