Thermal stability of the structure and optical properties of nanostructured TiO2 films S. L. Mikhailova, O. Yu. Prikhodko, Ye. S. Mukhametkarimov [et al.]
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ArticleContent type: Текст Media type: электронный Subject(s): пленки диоксида титана | ионно-плазменное напыление | отжиг | структура | оптическая ширина запрещенной зоны | индекс преломленияGenre/Form: статьи в журналах Online resources: Click here to access online
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Russian physics journal Vol. 63, № 12. P. 2045-2051Abstract: The structure and optical properties of titanium dioxide films have been studied during annealing from 100 to 400°C. The films were obtained by ion-plasma high-frequency magnetron sputtering of polycrystalline rutile target in an argon atmosphere. It was shown that as-prepared TiO2 films are nanostructured with ~8 nm rutile crystallites and ~3.3 Å interplanar distances and contain a small fraction of anatase. The optical band gap of the films is 3.01 eV, and the refractive index under normal conditions is 2.25. The film annealing at tamperatures from 100 to 400°C does not practically change their structure, optical band gap, and refractive index under normal conditions, i.e., the obtained nanostructured TiO2 films are thermally stable. © 2021, Springer Science+Business Media, LLC, part of Springer Nature.
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The structure and optical properties of titanium dioxide films have been studied during annealing from 100 to 400°C. The films were obtained by ion-plasma high-frequency magnetron sputtering of polycrystalline rutile target in an argon atmosphere. It was shown that as-prepared TiO2 films are nanostructured with ~8 nm rutile crystallites and ~3.3 Å interplanar distances and contain a small fraction of anatase. The optical band gap of the films is 3.01 eV, and the refractive index under normal conditions is 2.25. The film annealing at tamperatures from 100 to 400°C does not practically change their structure, optical band gap, and refractive index under normal conditions, i.e., the obtained nanostructured TiO2 films are thermally stable. © 2021, Springer Science+Business Media, LLC, part of Springer Nature.
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