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  • Your search returned 11 results.

    1.
    Piezoelectric Multilayer Beam Bending Actuators Электронный ресурс Static and Dynamic Behavior and Aspects of Sensor Integration / by Rüdiger G. Ballas.

    by Ballas, Rüdiger G | SpringerLink (Online service).

    Series: Microtechnology and MemsSource: Springer e-booksMaterial type: Computer file Computer file; Format: electronic available online remote Publication details: Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2007Online access: Click here to access online Availability: No items available :
    2.
    Integrated Chemical Microsensor Systems in CMOS Technology Электронный ресурс by Andreas Hierlemann ; edited by H. Baltes, Hiroyuki Fujita, Dorian Liepmann.

    by Hierlemann, Andreas | Baltes, H | Fujita, Hiroyuki | Liepmann, Dorian | SpringerLink (Online service).

    Series: Microtechnology and MEMSSource: Springer e-booksMaterial type: Computer file Computer file; Format: electronic available online remote Publication details: Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2005Online access: Click here to access online Availability: No items available :
    3.
    Force Sensors for Microelectronic Packaging Applications Электронный ресурс by Jürg Schwizer, Michael Mayer, Oliver Brand.

    by Schwizer, Jürg | Brand, Oliver | Mayer, Michael | SpringerLink (Online service).

    Series: Microtechnology and MEMSSource: Springer e-booksMaterial type: Computer file Computer file; Format: electronic available online remote Publication details: Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2005Online access: Click here to access online Availability: No items available :
    4.
    CMOS Hotplate Chemical Microsensors Электронный ресурс by Markus Graf, Diego Barrettino, Henry P. Baltes, Andreas Hierlemann.

    by Graf, Markus | Baltes, Henry P | Barrettino, Diego | Hierlemann, Andreas | SpringerLink (Online service).

    Series: Microtechnology and MEMSSource: Springer e-booksMaterial type: Computer file Computer file; Format: electronic available online remote Publication details: Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2007Online access: Click here to access online Availability: No items available :
    5.
    Surface Tension in Microsystems [electronic resource] : Engineering Below the Capillary Length / edited by Pierre Lambert.

    by Lambert, Pierre [editor.] | SpringerLink (Online service).

    Series: Microtechnology and MEMSSource: Springer eBooksMaterial type: Text Text; Format: electronic available online remote; Literary form: Not fiction Publication details: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2013Online access: Click here to access online Availability: No items available :
    6.
    Piezo-Electric Electro-Acoustic Transducers electronic resource by Valeriy Sharapov, Zhanna Sotula, Larisa Kunickaya.

    by Sharapov, Valeriy [author.] | Sotula, Zhanna [author.] | Kunickaya, Larisa [author.] | SpringerLink (Online service).

    Series: Microtechnology and MEMSSource: Springer eBooksMaterial type: Text Text; Format: electronic available online remote; Literary form: Not fiction Publication details: Cham : Springer International Publishing : Imprint: Springer, 2014Online access: Click here to access online Availability: No items available :
    7.
    Capillary Forces in Microassembly Электронный ресурс Modeling, Simulation, Experiments, and Case Study / by Pierre Lambert.

    by Lambert, Pierre | SpringerLink (Online service).

    Series: Microtechnology And MemsSource: Springer e-booksMaterial type: Computer file Computer file; Format: electronic available online remote Publication details: Boston, MA : Springer Science+Business Media, LLC, 2008Online access: Click here to access online Availability: No items available :
    8.
    Micromechanical Photonics Электронный ресурс by Hiroo Ukita.

    by Ukita, Hiroo | SpringerLink (Online service).

    Series: Microtechnology and MemsSource: Springer e-booksMaterial type: Computer file Computer file; Format: electronic available online remote Publication details: Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2006Online access: Click here to access online Availability: No items available :
    9.
    Thermal Transport for Applications in Micro/Nanomachining Электронный ресурс by Basil T. Wong, M. Pinar Mengüç; edited by Hiroyuki Fujita, Dorian Liepmann.

    by Wong, Basil T | Fujita, Hiroyuki | Liepmann, Dorian | Mengüç, M. Pinar | SpringerLink (Online service).

    Series: Microtechnology and MEMSSource: Springer eBooksMaterial type: Computer file Computer file; Format: electronic available online remote Publication details: Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2008Online access: Click here to access online Availability: No items available :
    10.
    CCD Image Sensors in Deep-Ultraviolet Электронный ресурс Degradation Behavior and Damage Mechanisms / by Flora M. Li, Arokia Nathan.

    by Li, Flora M | Nathan, Arokia | SpringerLink (Online service).

    Series: Microtechnology and MemsSource: Springer e-booksMaterial type: Computer file Computer file; Format: electronic available online remote Publication details: Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2005Online access: Click here to access online Availability: No items available :
    11.
    Piezotronics and Piezo-Phototronics electronic resource by Zhong Lin Wang.

    by Wang, Zhong Lin [author.] | SpringerLink (Online service).

    Series: Microtechnology and MEMSSource: Springer eBooksMaterial type: Text Text; Format: electronic available online remote; Literary form: Not fiction Publication details: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2012Online access: Click here to access online Availability: No items available :