Effect of short-pulsed ion irradiation on the optical and electrical properties of titanium nitride films deposited by reactive magnetron sputtering F. V. Konusov, S. K. Pavlov, A. L. Lauk [et al.] by Konusov, Fedor V | Pavlov, S. K | Lauk, A. L | Kabyshev, A. V | Novikov, V | Gadirov, Ruslan M | Tarbokov, V. A | Remnev, Gennady E.
Source: Nuclear instruments and methods in physics research. Section B : Beam interactions with materials and atomsMaterial type: 
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