Scientific Library of Tomsk State University

   E-catalog        

Your search returned 2 results.

1.
Feature Profile Evolution in Plasma Processing Using On-wafer Monitoring System electronic resource by Seiji Samukawa.

by Samukawa, Seiji [author.] | SpringerLink (Online service).

Series: SpringerBriefs in Applied Sciences and TechnologySource: Springer eBooksMaterial type: Text Text; Format: electronic available online remote; Literary form: Not fiction Publication details: Tokyo : Springer Japan : Imprint: Springer, 2014Online access: Click here to access online Availability: No items available :
2.
New Trends in Atomic and Molecular Physics [electronic resource] : Advanced Technological Applications / edited by Man Mohan.

by Mohan, Man [editor.] | SpringerLink (Online service).

Series: Springer Series on Atomic, Optical, and Plasma PhysicsSource: Springer eBooksMaterial type: Text Text; Format: electronic available online remote; Literary form: Not fiction Publication details: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2013Online access: Click here to access online Availability: No items available :