Scientific Library of Tomsk State University

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1.
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Plasma-assisted deposition of dielectric conformal coating using hexamethyldisiloxane as precursor D. A. Zuza, A. Batrakov, V. O. Nekhoroshev [et al.]

by Zuza, Daniil A | Batrakov, Alexander V | Nekhoroshev, Vitaly O | Kurzina, Irina A | Popov, Sergey A.

Source: 2020 7th International Congress on energy fluxes and radiation effects (EFRE 2020), Tomsk, Russia, September 14 – 26, 2020 : proceedingsMaterial type: Article Article; Format: electronic available online remote; Literary form: Not fiction ; Audience: Specialized; Online access: Click here to access online Availability: No items available :
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2.
No cover image available
Characterization of hexamethyldisiloxane plasma polymerization in a DC glow discharge in an argon flow D. A. Zuza, V. O. Nekhoroshev, A. V. Batrakov [et al.]

by Zuza, Daniil A | Nekhoroshev, Vitaly O | Batrakov, Alexander V | Markov, Alexey B | Kurzina, Irina A.

Source: VacuumMaterial type: Article Article; Format: electronic available online remote Online access: Click here to access online Availability: No items available :
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