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Multiple thermal cycling and phase transitions in Ge-Sb-Te materials A. A. Sherchenkov, S. A. Kozyukhin, N. Borgardt [et al.]

Contributor(s): Kozyukhin, Sergey A | Borgardt, N | Babich, A. V | Lazarenko, Petr I | Sybina, Yu | Tolepov, Zh | Prikhodko, O. Yu | Sherchenkov, Alexey AMaterial type: ArticleArticleContent type: Текст Media type: электронный Subject(s): дифференциальная сканирующая калориметрия | термоциклирование | материалы с фазовым переходом | тонкие пленкиGenre/Form: статьи в журналах Online resources: Click here to access online In: Journal of non-crystalline solids Vol. 501. P. 101-105Abstract: Structural transformations in Ge2Sb2Te5 thin films fabricated by the thermal evaporation in vacuum (TEV) and DC magnetron sputtering (MS) were studied by the differential scanning calorimetry (DSC). Multiple DSC measurements revealed the appearance of reproducible endothermic peaks in all samples in the temperature range of 390–425 °C (one for TEV and two for MS films, respectively). Investigations by X-ray diffraction, scanning and transmission electron microscopes were carried out, and the natures of these endothermic peaks were discussed.
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Structural transformations in Ge2Sb2Te5 thin films fabricated by the thermal evaporation in vacuum (TEV) and DC magnetron sputtering (MS) were studied by the differential scanning calorimetry (DSC). Multiple DSC measurements revealed the appearance of reproducible endothermic peaks in all samples in the temperature range of 390–425 °C (one for TEV and two for MS films, respectively). Investigations by X-ray diffraction, scanning and transmission electron microscopes were carried out, and the natures of these endothermic peaks were discussed.

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