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Shape and Functional Elements of the Bulk Silicon Microtechnique Электронный ресурс A Manual of Wet-Etched Silicon Structures / by Joachim Frühauf
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Computer filePublication details: Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2005ISBN: 9783540268765Subject(s): Chemical engineering | electronics | Microwaves | Optical materials | chemistry | Ceramics, Glass, Composites, Natural Methods | Electronics and Microelectronics, Instrumentation | Industrial Chemistry/Chemical Engineering | Microwaves, RF and Optical Engineering | Optical and Electronic MaterialsOnline resources: Click here to access online
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