TY - DATA AU - Ballas,RĂ¼diger G. ED - SpringerLink (Online service) TI - Piezoelectric Multilayer Beam Bending Actuators: Static and Dynamic Behavior and Aspects of Sensor Integration T2 - Microtechnology and Mems, SN - 9783540326427 PY - 2007/// CY - Berlin, Heidelberg PB - Springer-Verlag Berlin Heidelberg KW - electronics KW - engineering KW - Mechanics, applied KW - Optical materials KW - physics KW - Structural control (Engineering) KW - Engineering KW - Complexity KW - Control Engineering KW - Electronics and Microelectronics, Instrumentation KW - Optical and Electronic Materials KW - Theoretical and Applied Mechanics UR - http://dx.doi.org/10.1007/978-3-540-32642-7 ER -