TY  - DATA
AU  - Schwizer,Jürg
AU  - Brand,Oliver
AU  - Mayer,Michael
ED  - SpringerLink (Online service)
TI  - Force Sensors for Microelectronic Packaging Applications
T2  - Microtechnology and MEMS,
SN  - 9783540269458
PY  - 2005///
CY  - Berlin, Heidelberg
PB  - Springer-Verlag Berlin Heidelberg
KW  - electronics
KW  - engineering
KW  - Nanotechnology
KW  - Optical materials
KW  - System safety
KW  - chemistry
KW  - Electronics and Microelectronics, Instrumentation
KW  - Optical and Electronic Materials
KW  - Physics and Applied Physics in Engineering
KW  - Quality Control, Reliability, Safety and Risk
UR  - http://dx.doi.org/10.1007/b138345
ER  -