TY  - DATA
AU  - Frühauf,Joachim
ED  - SpringerLink (Online service)
TI  - Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures 
SN  - 9783540268765
PY  - 2005///
CY  - Berlin, Heidelberg
PB  - Springer-Verlag Berlin Heidelberg
KW  - Chemical engineering
KW  - electronics
KW  - Microwaves
KW  - Optical materials
KW  - chemistry
KW  - Ceramics, Glass, Composites, Natural Methods
KW  - Electronics and Microelectronics, Instrumentation
KW  - Industrial Chemistry/Chemical Engineering
KW  - Microwaves, RF and Optical Engineering
KW  - Optical and Electronic Materials
UR  - http://dx.doi.org/10.1007/b138230
ER  -