TY  - DATA
AU  - Zhang,G.Q.
AU  - Driel,W.D.
AU  - Fan,X.J.
ED  - SpringerLink (Online service)
TI  - Mechanics of Microelectronics
T2  - Solid mechanics and its applications,
SN  - 9781402049354
PY  - 2006///
CY  - Dordrecht
PB  - Springer
KW  - engineering
KW  - Mechanical engineering
KW  - Engineering
KW  - Mechanical Engineering
KW  - Numerical and Computational Methods in Engineering
UR  - http://dx.doi.org/10.1007/1-4020-4935-8
ER  -