TY - DATA AU - Santos,Héctor J. ED - SpringerLink (Online service) TI - Principles and Applications of NanoMEMS Physics T2 - Microsystems, SN - 9780387258348 PY - 2005/// CY - Boston, MA PB - Springer KW - Computer engineering KW - Laser physics KW - Nanotechnology KW - Optical materials KW - Quantum optics KW - chemistry KW - Electronic and Computer Engineering KW - Laser Technology and Physics, Photonics KW - Optical and Electronic Materials KW - Quantum Optics, Quantum Electronics, Nonlinear Optics UR - http://dx.doi.org/10.1007/b136228 ER -