TY  - DATA
AU  - Jackson,Mark J.
ED  - SpringerLink (Online service)
TI  - Micro and Nanomanufacturing
SN  - 9780387261324
PY  - 2007///
CY  - Boston, MA
PB  - Springer Science+Business Media, LLC
KW  - electronics
KW  - engineering
KW  - Machinery
KW  - Mechanical engineering
KW  - Engineering
KW  - Electronics and Microelectronics, Instrumentation
KW  - Manufacturing, Machines, Tools
KW  - Mechanical Engineering
UR  - http://dx.doi.org/10.1007/b136902
ER  -