TY  - DATA
AU  - Setter,Nava
ED  - SpringerLink (Online service)
TI  - Electroceramic-Based MEMS: Fabrication-Technology and Applications 
T2  - Electronic Materials: Science and Technology,
SN  - 9780387233192
PY  - 2005///
CY  - Boston, MA
PB  - Springer Science+Business Media, Inc.
KW  - electronics
KW  - Materials
KW  - Nanotechnology
KW  - Optical materials
KW  - chemistry
KW  - Ceramics, Glass, Composites, Natural Methods
KW  - Characterization and Evaluation Materials
KW  - Electronics and Microelectronics, Instrumentation
KW  - Optical and Electronic Materials
UR  - http://dx.doi.org/10.1007/b101200
ER  -