TY  - DATA
AU  - Leondes,Cornelius T.
ED  - SpringerLink (Online service)
TI  - MEMS/NEMS: Handbook Techniques and Applications 
SN  - 9780387257860
PY  - 2006///
CY  - Boston, MA
PB  - Springer Science+Business Media, Inc.
KW  - electronics
KW  - Engineering design
KW  - Mechanical engineering
KW  - Nanotechnology
KW  - Optical materials
KW  - chemistry
KW  - Electronics and Microelectronics, Instrumentation
KW  - Engineering Design
KW  - Mechanical Engineering
KW  - Optical and Electronic Materials
UR  - http://dx.doi.org/10.1007/b136111
ER  -