Generation of low-temperature plasma by low-pressure arcs for synthesis of nitride coatings O. V. Krysina, N. N. Koval, I. V. Lopatin [et.al.]
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ArticleSubject(s): низкотемпературная плазма | нитридные покрытия | вакуумно-дуговое нанесение покрытийGenre/Form: статьи в журналах Online resources: Click here to access online
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Journal of Physics: Conference Series Vol. 669. P. 012032 (1-10)Abstract: Experiments were performed to study gas, metal, and mixed metal-gas plasmas. The plasmas were generated with the use of an arc evaporator and a gas-plasma source with a hot filament and hollow cathode that were operated independently or simultaneously. It has been revealed that the arc current of gas-plasma source affects the parameters of the metal-gas plasma and the element concentrations in the coatings. It has been demonstrated that the characteristics of the nitride coatings produced by plasma-assisted vacuum-arc deposition can be controlled by varying the parameters of the arc in the gas-plasma source.
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Experiments were performed to study gas, metal, and mixed metal-gas plasmas. The plasmas were generated with the use of an arc evaporator and a gas-plasma source with a hot filament and hollow cathode that were operated independently or simultaneously. It has been revealed that the arc current of gas-plasma source affects the parameters of the metal-gas plasma and the element concentrations in the coatings. It has been demonstrated that the characteristics of the nitride coatings produced by plasma-assisted vacuum-arc deposition can be controlled by varying the parameters of the arc in the gas-plasma source.
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