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Micro and Nanomanufacturing Электронный ресурс by Mark J. Jackson.
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Computer filePublication details: Boston, MA : Springer Science+Business Media, LLC, 2007ISBN: 9780387261324Subject(s): electronics | engineering | Machinery | Mechanical engineering | Engineering | Electronics and Microelectronics, Instrumentation | Manufacturing, Machines, Tools | Mechanical EngineeringOnline resources: Click here to access online
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