Modification of the microstructure of TiN-based columnar coatings in indentation zones S. V. Ovchinnikov, A. D. Korotaev, Yu. P. Pinzhin
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ArticleSubject(s): деформация | нитрид титана | микроструктураGenre/Form: статьи в журналах Online resources: Click here to access online
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Russian metallurgy (Metally) № 4. P. 278-284Abstract: The columnar structure of titanium nitride–based coatings deposited by magnetron sputtering is studied. The structure–phase state of the coatings is analyzed after deposition and in the indentation zone. The type of dislocation structure, the grain size, the subgrain size, the misorientations at boundaries, and their change during coating growth are determined. The detected decrease (several tens of percent) in the coating thickness under an indenter indicates plastic deformation of a coating. On a microscopic level, this deformation manifests itself in an increase in the density, the misorientation, and the nonequilibrium of boundaries.
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The columnar structure of titanium nitride–based coatings deposited by magnetron sputtering is studied. The structure–phase state of the coatings is analyzed after deposition and in the indentation zone. The type of dislocation structure, the grain size, the subgrain size, the misorientations at boundaries, and their change during coating growth are determined. The detected decrease (several tens of percent) in the coating thickness under an indenter indicates plastic deformation of a coating. On a microscopic level, this deformation manifests itself in an increase in the density, the misorientation, and the nonequilibrium of boundaries.
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